Nordson Electronics Solutions – Vacuum Plasma Treatment Systems – AP Series
AP series plasma treatment machines are suitable for a wide variety of plasma cleaning, surface activation and adhesion improvement applications. These capabilities are used for semiconductor manufacturing, microelectronic packaging and assembly, and by manufacturers of medical and life science devices. The AP Series consists of four batch plasma treatment systems offering small, mid-size and large vacuum chamber options that deliver process correlation, controller continuity and reliable, reproducible vacuum gas plasma treatment to customers as they expand from an R&D environment to various levels of production.
Key Features
- PLC controller with touch screen provides an intuitive graphical interface and real time process representation
- Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or downstream plasma mode
- 13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility
- Proprietary software control system generates process and production data for statistical process control
- Batch style, each unit is completely self-contained, requiring minimal floor space
- The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure
Technical Specifications
AP 300 | AP 600 | AP 1000 | AP 1500 | ||
---|---|---|---|---|---|
W x D x H – Footprint | 569W x 869D x 704H mm (22W x 34D x 28H in.) | 569W x 869D x 704H mm (22W x 34D x 28H in.) | 880W x 1127D x 1880H (28.77W x62.3D x74.4H in.) | 1118W x 1196D x 2407H mm (44W x 47D x 95H in.) | |
Net Weight | 221 kg (487 lbs) | 221 kg (487 lbs) | 485 kg (1088 Ibs) | 921 kg (2030 Ibs) | |
Maximum Volume | 33.1 liters (2023 in³) | 50.4 liters (3076 in³) | Right, Left – 153 mm (6 in.), Front – 880 mm (27 in.) Back – 483 mm (19 in.) min. 127 liters | 442.4 liters (27.000 in3) | |
Variable Electrode Configurations | Power-Ground, Ground-Power, Power-Power | Power-Ground, Ground-Power, Power-Power | Power-Ground, Ground-Power, Power-Power | Power-Ground, Ground-Power, Power-Power | |
Number of Electrode Positions | 7 | 7 | 14 | 14 | |
Electrode Pitch | 25.4 mm (1 in.) | 25.4 mm (1 in.) for 80D W 50.8 mm (2 in.) for 100o W | 25.4 mm (1 in.) for 80D W 50.8 mm (2 in.) for 100o W | 50.8 mm (2 in.) | |
Powered Working Area | 190W x 330D mm (7.5W x 13D in.) | 349W x 425D (13.74W x 18.73D in.) 384W x 425D mm (15.12W x 18.73D in.) | 349W x 425D (13.74W x 18.73D in.) 384W x 425D mm (15.12W x 18.73D in.) | 843W x841D mm (25.3W x25.2D in.) | |
Standard Wattage | 300 W | 600W | 600W | 2000 W | |
Available Flow Volumes | 10, 25, 50, 100, 250 or 500 sccm | 10, 25, 50, 100, 250 or 500 sccm | 10, 25, 50, 100, 250, 500, 10D0, 2000 or 5000 sccm | 10, 25, 50, 100, 250, 500, 1000, 2000 or 5000 socm | |
For further details, please refer to enclosed brochure. |
Available Models
Brand
Nordson Electronics Solutions is a leading provider of plasma processing technology to various industries such as semiconductor, PCB, microelectronics, solar, LED, and medical & life science device manufacturing. The company has global presence with offices and labs in several locations including California, Florida, Europe, Singapore, China, Japan, Korea, India and Taiwan. Nordson Electronics Solutions has been continuously innovating for more than two decades and offers a range of patented plasma processing systems that have won awards. The company also has a team of expert scientists and engineers to help develop plasma processes that enhance product reliability and production yields.
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