Surfx – Argon Plasma Systems
The AtomfloTM 600 argon plasma system is ideally suited for in-line cleaning and activation of materials prior to bonding. The plasma produces a beam of reactive atoms that etch away contaminants on the surface all the way down to the atomic scale. The compact and lightweight plasma head, together with the low-voltage, radio-frequency power supply, make it safe and easy to integrate surface treatment into any assembly line. The beam of reactive atoms is low temperature and 100% electrically neutral. It treats metals, glass, and plastics. It will not damage sensitive electronics, or thin film polymers, such as polyethylene. An in-line production system can treat millions of parts per year at a cost of ownership of a few cents per part.
Key Features
- Embedded software
- System limits and alarms
- Manage recipes
- Advanced monitoring and control
- Automation
- Versatile chemistry
- Auto-tuning matching network
Available Models
The Atomflo 600 mounted on a benchtop robot is our best-selling product for R&D, Universities, and industrial laboratories worldwide. These systems are easy to install and use. Boost your materials processing capabilities to a new level.
The 100-mm-wide argon plasma beam cleans and activates surfaces much faster and more uniformly than open air plasma with 10-mm-wide spots. Also, Surfx machines monitor and control every process parameter in real time. Nobody else offers this level of process traceability.
Key Industries
- Semiconductor, Solar & Electronics
Surfx Technologies offers a full range of atmospheric plasma tools for treating microelectro-mechanical systems (MEMS), microfluidics, semiconductors, solar cells, medical…
